Effect of the vacuum on Structural and Morphological Properties of Ga2O3 NPs Thin Films by (PLD) Technique

In this study, thin films of Gallium oxide nanoparticles were equipped using the

method of pulsed laser deposition (PLD)on a glass substrate under different

vacuum conditions (5×10-5, 2×10-2, and 1mbar). The Nd-YAG laser was

utilized at a wavelength of 1064 nm and a frequency of 5 Hz at 130 0C. The

increase effect of the vacuum value on the optical and structural characteristics

was studied by UV-VIS, X-ray diffraction )XRD), scanning electron microscopy

(SEM), and Photoluminescence properties (PL). The outcomes XRD showed that

the structure of Ga2O3 nanoparticles is a polycrystalline structure of the

monoclinic type, with Prominent crystal orientations of (001), (201), (400), (-

202), (111), and (-112). It is according to JCPDS card No.00-041-1103.

Crystallite size for the complete model decreased with the growth of the

vacuum value. The (SEM) images showed that Ga2o3 nanoparticles are spherical

and homogeneous. The energy band gap increased with increasing the vacuum,

and the absorption upper was in the UV zone. Similar results were obtained from

the researcher MA Yan-Mei et al. [1].